Effect of Experimental Factors in the Growth of Carbon Nanotubes from CO2 by MPECVD Process
Fritzie Hannah Baldovino(1*), Joseph L. Auresenia(2)
(1) 
(2) 
(*) Corresponding Author
Abstract
The effects of experimental factors such as type of catalyst (nickel and cobalt) and substrate (iron and silicon wafer) in the growth of carbon nanotubes (CNT) from CO2 by microwave plasma-enhanced chemical vapor deposition (MPECVD) was systematically studied. Catalyst size and CNT grown were examined using scanning electron microscope (SEM). Furthermore, gas chromatography (GC) was used to analyze the effluent gas. Moreover, suitable type of catalyst and substrate were determined in terms on the amount of CNT grown, purity, and carbon conversion.
Keywords : carbon nanotubes, chemical vapor deposition, nanotechnology
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DOI: https://doi.org/10.22146/ajche.49714
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ASEAN Journal of Chemical Engineering (print ISSN 1655-4418; online ISSN 2655-5409) is published by Chemical Engineering Department, Faculty of Engineering, Universitas Gadjah Mada.